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Langmuir

Volumn 21, Issue 22, 2005, Pages 10096-10105

Masterless soft lithography: Patterning UV/Ozone-induced adhesion on poly(dimethylsiloxane) surfaces

(4) Childs, William R a Motala, Michael J a Lee, Keon Jae b Nuzzo, Ralph G a,b

a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN (United States)

b University of Illinois at Urbana Champaign (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DECAL TRANSFER LITHOGRAPHY (DTL); INTERFACIAL ADHESION; POLY(DIMETHYLSILOXANE) (PDMS); SOFT LITHOGRAPHIC PATTERNING TECHNIQUES;

ADHESION; DEUTERIUM; MICROSTRUCTURE; OZONE; SECONDARY ION MASS SPECTROMETRY; SILICONES; SURFACES; THIN FILMS; ULTRAVIOLET RADIATION;

PHOTOLITHOGRAPHY;

EID: 27544477296 PISSN: 07437463 EISSN: None Source Type: Journal
DOI: 10.1021/la050011b Document Type: Article

Times cited : (62)

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