Techniques and applications for non-planar lithography

Materials Research Society Symposium - Proceedings

Volumn 739, Issue , 2002, Pages 31-38

  Rogers, John A ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; PRINTING;

NON-PLANAR LITHOGRAPHY;

LITHOGRAPHY;

EID: 0042622427     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-739-h1.2     Document Type: Conference Paper

References (15)

1. C. A. Mirkin and J. A. Rogers, MRS Bull. 26, 506 (2001).
2. A. Kumar and G.M. Whitesides, Appl. Phys. Lett. 63, 2002 (1993).
3. R.J. Jackman, J. Wilbur and G.M. Whitesides, Science 269, 664 (1995).
4. J.A. Rogers, MRS Bull. 26, 530 (2001).
5. R.J. Jackman, S.T. Brittain, A. Adams, M.G. Prentiss and G.M. Whitesides, Science 280, 2089 (1998).
6. J.A. Rogers, R.J. Jackman, J.L. Wagener, A.M. Vengsarkar and G.M. Whitesides, Appl. Phys. Lett. 70, 7 (1997).
7. Y.-L. Loo, R.L. Willett, K. Baldwin and J.A. Rogers, Appl Phys. Lett. 81, 562 (2002).
8. Y.-L. Loo, R.L. Willett, K. Baldwin and J.A. Rogers, J. Am. Chem. Soc. 124, 7654 (2002).
9. Y.-L. Loo, J.W.P. Hsu, R.L. Willett, K.W. Baldwin, K.W. West and J.A. Rogers, J. Vac. Sci. Techn. B., in press.
10. J.A. Rogers, R.J. Jackman and G.M. Whitesides, Adv. Mater. 9, 475 (1997).
11. J.A. Rogers, R.J. Jackman, G.M. Whitesides, D.L. Olson and J.V. Sweedler, Appl. Phys. Lett. 70, 2464 (1997).
12. J.A. Rogers, R.J. Jackman and G.M. Whitesides, J. Microelectromech. Syst. (JMEMS) 6, 184 (1997).
13. R.J. Jackman, J.A. Rogers and G.M. Whitesides, IEEE Trans. Magn. 33, 2501 (1997).
14. J.A. Rogers, M. Meier and A. Dodabalapur, Appl. Phys. Lett. 74, 3257 (1999).
15. J.A. Rogers, Z. Bao, A. Dodabalapur, O.J.A. Schueller and G.M. Whitesides, Synth. Met., 115, 5 (2000).