Fabrication of high performance ceramic microstructures from a polymeric precursor using soft lithography

Advanced Materials

Volumn 13, Issue 1, 2001, Pages 54-58

  Yang, Hong ^a   Deschatelets, Pascal ^a   Brittain, Scott T ^a   Whitesides, George M ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NITRIDE; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; PHASE TRANSITIONS; PYROLYSIS; SCANNING ELECTRON MICROSCOPY; SILICON NITRIDE; SILICONES; STRENGTH OF MATERIALS; SYNTHESIS (CHEMICAL); THERMOOXIDATION;

POLYDIMETHYLSILOXANES; SOFT LITHOGRAPHY;

CERAMIC MATERIALS;

EID: 0035131680     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-4095(200101)13:1<54::AID-ADMA54>3.0.CO;2-Y     Document Type: Article

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