Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer

Journal of Microelectromechanical Systems

Volumn 9, Issue 1, 2000, Pages 76-81

  Jo, Byung Ho ^c   Van Lerberghe, Linda M ^a   Motsegood, Kathleen M ^a   Beebe, David J ^a,b  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b UNIVERSITY OF WISCONSIN MADISON   (United States)

^c NONE

Author keywords

[No Author keywords available]

Indexed keywords

CHANNEL FLOW; ELASTOMERS; EPOXY RESINS; FABRICATION; MULTILAYERS; PHOTORESISTS; POLYESTERS; REACTIVE ION ETCHING; SILICON WAFERS; SURFACE TREATMENT; THICKNESS CONTROL; THREE DIMENSIONAL;

MICROFLUIDIC CHANNELS; POLYDIMETHYLSILOXANE ELASTOMER; PYREX WAFER; SURFACE ACTIVATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0033876850     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.825780     Document Type: Article

References (12)

1. P. Renaud, H. Van Lintel, M. Heuschkel, and L. Guerin, "Photo-polymer microchannel technologies and applications," in Process. uTAS'98, Banff, Canada, Oct., pp. 17-21.
2. B. D. DeBusschere, D. A. Borkholder, and G. T. A. Kovacs, "Design of an integrated silicon-PDMS cell cartridge," in Solid State Sens. Actuators Conf., Hilton Head, SC, June 1998, pp. 358-362.
3. S. Masuda, M. Washizu, and T. Nanba, "Novel method of cell fusion in field constriction area in fluid integrated circuit," IEEE Ind. Applicat. Mag., vol. 25, pp. 732-737, 1989.
4. Y. Xia and G. Whitesides, "Soft lithography," Angew Chem. Int. Ed., vol. 37, pp. 550-575, 1998.
5. K. Hosogawa, T. Fujii, and I. Endo, "Hydrophobic microcapillary vent for pneumatic manipulation of liquid in μTAS," in Process. uTAS'98, Banff, Canada, pp. 307-310.
6. R. H. Liu, K. V. Sharp, M. G. Olsen, M. A. Stremler, J. G. Santiago, R. J. Adrian, H. Aref, and D. J. Beebe, "A passive micromixer: Three-dimensional serpentine microchannel." in Proc. Transducers'99, Sendai, Japan, pp. 730-733.
7. D. Jaeggi, B. L. Gray, N. J. Mourlas, B. P. Van Drieenhuizen, K. R. Williams, N. I. Maluf, and G. T. A. Kovacs, "Novel interconnection technologies for integrated microfluidic systems," in Solid Stale Sens. Actuators Conf., Hilton Head, SC, June 1998, pp. 112-115.
8. X. Yang, C. Grosjean, and Y. C. Tai, "A low power MEMS silicone/parylene valve," in Solid State Sens. Actuators Conf, Hilton Head, SC, June 1998, pp. 316-319.
9. A. K. Henning, J. M. Herris, E. B. Arkilic, B. Cozad, and B. Dehan, "Performance of MEMS based gas distribution and control systems for semiconductor processing," Proc. SPIE, vol. 3514, p. 59, 1998.
10. H. Lorenz, M. Despont, N. Fahrni, J. Bruger, P. Vettiger, and P. Renaud, "High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS," Sens. Actuators, vol. 64, pp. 33-39, 1998.
11. G. D. Aumiller, E. A. Chandross, W. J. Tomlinson, and H. P. Weber, "Submicrometer resolution replication of relief patterns for integrated optics,", J. Appl. Phys., vol. 45, no. 10, p. 4557, 1974.
12. G. M. Whitesides, private communication, 1998.