Sensors and actuators on non-planar substrates

Sensors and Actuators, A: Physical

Volumn 73, Issue 1-2, 1999, Pages 80-88

  Li, Wen J ^a   Mai, John D ^b   Ho, Chih Ming ^b  

^a CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MASKS; MICROACTUATORS; MICROSENSORS; PHOTORESISTS;

NONPLANAR LITHOGRAPHY;

MICROELECTROMECHANICAL DEVICES;

EID: 0033537527     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00258-1     Document Type: Article

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