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Volumn 37, Issue 4, 2005, Pages 227-247

The present status of Si/ SiO2 superlattice research into optoelectronic applications

Author keywords

Characterization; Deposition technologies; Properties; Si SiO2 superlattices

Indexed keywords

CHARACTERIZATION; DEPOSITION; DOPING (ADDITIVES); ERBIUM; HYDROFLUORIC ACID; LIGHT EMITTING DIODES; OPTICAL FIBERS; OPTOELECTRONIC DEVICES; POSITIVE IONS; SEMICONDUCTING SILICON; SILICA;

EID: 15444375620     PISSN: 07496036     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.spmi.2005.01.001     Document Type: Review
Times cited : (30)

References (60)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.