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Physica E: Low-Dimensional Systems and Nanostructures

Volumn 11, Issue 2-3, 2001, Pages 99-103

Self-organization and ordering in nanocrystalline Si/SiO2 superlattices

(7) Lockwood, D J a Grom, G F b Tsybeskov, L b Fauchet, P M b Labbe H J a,b McCaffrey, J P a,b White, B c

a NATIONAL RESEARCH COUNCIL CANADA (Canada)

b UNIVERSITY OF ROCHESTER (United States)

c MOTOROLA INC (United States)

Author keywords

Crystallization; Nanocrystals; Silicon; Silicon dioxide; Superlattice

Indexed keywords

ANNEALING; CRYSTAL ORIENTATION; CRYSTALLIZATION; NANOSTRUCTURED MATERIALS; SEMICONDUCTING SILICON; ULTRATHIN FILMS;

QUANTUM DEVICES;

SEMICONDUCTOR SUPERLATTICES;

EID: 0035475185 PISSN: 13869477 EISSN: None Source Type: Journal
DOI: 10.1016/S1386-9477(01)00183-7 Document Type: Article

Times cited : (8)

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