Microstructures of patterned nc-Si superlattices made by pulsed laser interference crystallization

Superlattices and Microstructures

Volumn 31, Issue 6, 2002, Pages 285-288

  Zhu, L Y ^a   Huang, X F ^a   Fan, W B ^a   Wang, X W ^a   Li, W ^a   Wang, L ^a   Chen, K J ^a  

^a NANJING UNIVERSITY   (China)

Author keywords

Excimer laser; Laser induced crystallization; Nanocrystal Si; Phase shifting mask grating; Superlattices

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTALLIZATION; HIGH RESOLUTION ELECTRON MICROSCOPY; LASER APPLICATIONS; MICROELECTRONICS; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; OPTOELECTRONIC DEVICES; PHASE SHIFT; PHASE TRANSITIONS; POSITIVE IONS; QUANTUM THEORY; SUPERLATTICES; TRANSMISSION ELECTRON MICROSCOPY;

EXCIMER; LASER PHASE-SHIFTING MASK GRATING; LASER-INDUCED CRYSTALLIZATION; NANOCRYSTAL SI;

SILICON;

EID: 10844295132     PISSN: 07496036     EISSN: None     Source Type: Journal    
DOI: 10.1006/spmi.2002.1047     Document Type: Article

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