Anneal temperature dependence of Si/SiO2 superlattices photoluminescence

Physica E: Low-Dimensional Systems and Nanostructures

Volumn 16, Issue 3-4, 2003, Pages 439-444

  Portier, X ^a   Ternon, C ^a   Gourbilleau, F ^a   Dufour, C ^a   Rizk, R ^a  

^a LERMAT Laboratoire d'Etude et de Recherche sur les Materiaux   (France)

Author keywords

High resolution transmission electron microscopy (HRTEM); Photoluminescence; Reactive magnetron sputtering; Si SiO2 multilayers

Indexed keywords

ANNEALING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HIGH RESOLUTION ELECTRON MICROSCOPY; PHOTOLUMINESCENCE; SUPERLATTICES; X RAY SPECTROSCOPY;

REACTIVE MAGNETRON SPUTTERING;

SILICA;

EID: 0037373059     PISSN: 13869477     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1386-9477(02)00628-8     Document Type: Conference Paper

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