Effects of unique ion chemistry on thin-film growth by plasma-surface interactions

Proceedings of the National Academy of Sciences of the United States of America

Volumn 97, Issue 1, 2000, Pages 23-27

  Wijesundara, Muthu B J ^a   Hartley, Luke ^a   Ni, Boris ^b   Sinnott, Susan B ^b  

^a UNIVERSITY OF ILLINOIS AT CHICAGO   (United States)

^b UNIVERSITY OF KENTUCKY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLUOROCARBON; ION; POLYSTYRENE;

ARTICLE; CHEMICAL STRUCTURE; COMPUTER MODEL; COMPUTER SIMULATION; ENERGY TRANSFER; FILM; KINETICS; MOLECULAR DYNAMICS; PLASMA; PRIORITY JOURNAL; X RAY SPECTROMETRY;

EID: 12944263707     PISSN: 00278424     EISSN: None     Source Type: Journal    
DOI: 10.1073/pnas.97.1.23     Document Type: Article

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