Implantation and damage under low-energy Si self-bombardment

Physical Review B - Condensed Matter and Materials Physics

Volumn 57, Issue 8, 1998, Pages 4756-4763

  Hensel, Hartmut ^a   Urbassek, Herbert M ^a  

^a Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001619367     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.57.4756     Document Type: Article

References (27)

1. M. Kitabatake, P. Fons, and J. E. Greene, J. Vac. Sci. Technol. A 8, 3726 (1990).
2. M. Kitabatake, P. Fons, and J. E. Greene, J. Vac. Sci. Technol. A 9, 91 (1991).
3. M. Kitabatake and J. E. Greene, Thin Solid Films 272, 271 (1996).
4. M. Schneider, I. K. Schuller, and A. Rahman, Phys. Rev. B 36, 1340 (1987).
5. E. T. Gawlinski and J. D. Gunton, Phys. Rev. B 36, 4774 (1987).
6. R. Biswas, G. S. Grest, and C. M. Soukoulis, Phys. Rev. B 38, 8154 (1988).
7. G. H. Gilmer and C. Roland, Appl. Phys. Lett. 65, 824 (1994).
8. B. Strickland and C. Roland, Phys. Rev. B 51, 5061 (1995).
9. M. V. Ramana Murty and H. A. Atwater, Phys. Rev. B 45, 1507 (1992).
10. T. Diaz de la Rubia and G. H. Gilmer, Phys. Rev. Lett. 74, 2507 (1995).
11. M. J. Caturla, T. Diaz de la Rubia, and G. H. Gilmer, Nucl. Instrum. Methods Phys. Res. B 106, 1 (1995).
12. S. U. Campisano, S. Coffa, V. Raineri, F. Priolo, and E. Rimini, Nucl. Instrum. Methods Phys. Res. B 80/81, 514 (1993).
13. K. Gärtner et. al Nucl. Instrum. Methods Phys. Res. B 102, 183 (1995).
14. H. Hensel and H. M. Urbassek, Radiat. Eff. Defects Solids 142, 497 (1997).
15. F. H. Stillinger and T. A. Weber, Phys. Rev. B 31, 5262 (1985).
16. J. F. Ziegler, J. P. Biersack, and U. Littmark, Stopping Powers and Ranges of Ions in Matter (Pergamon, New York, 1985).
17. W. D. Luedtke and U. Landman, Phys. Rev. B 40, 1164 (1989).
18. J. Fortner and J. S. Lannin, Phys. Rev. B 39, 5527 (1989).
19. G. Servalli and L. Colombo, Europhys. Lett. 22, 107 (1993).
20. G. Leibfried, Nukleonik 1, 57 (1958).
21. K. Nordlund, J. Keinonen, and A. Kuronen, Phys. Scr. T54, 34 (1994).
22. P. Sigmund, Appl. Phys. Lett. 14, 114 (1969).
23. W. L. Brown and A. Ourmazd, MRS Bull. 17, No. 6, 30 (1992).
24. M.-J. Caturla, T. Diaz de la Rubia, L. A. Marques, and G. H. Gilmer, Phys. Rev. B 54, 16 683 (1996).
25. G.-Q. Lu, E. Nygren, and M. J. Aziz, J. Appl. Phys. 70, 5323 (1991).
26. W. Bock, H. Gnaser, and H. Oechsner, Surf. Sci. 282, 333 (1993).
27. V. Konoplev and A. Gras-Marti, Philos. Mag. A 71, 1265 (1995).