Energetics, timescales, and chemistry of low energy molecular ion-organic surface collisions

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 157, Issue 1-4, 1999, Pages 174-182

  Hanley, Luke ^a   Lim, Hanjo ^a   Schultz, David G ^a   Garbis, Spiros ^a   Yu, Chongwoo ^a   Ada, Earl T ^a   Wijesundara, Muthu B J ^a  

^a UNIVERSITY OF ILLINOIS AT CHICAGO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DISSOCIATION; ENERGY TRANSFER; GOLD; IONS; MONOLAYERS; SURFACE TREATMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

LOW ENERGY MOLECULAR ION ORGANIC SURFACE COLLISIONS;

SURFACE CHEMISTRY;

EID: 0033516775     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00426-7     Document Type: Article

References (35)

1. Toyoda N., Kitani H., Matsuo J., Yamada I. Nucl. Instr. and Meth. B. 121:1997;484.
2. The National Roadmap for Semiconductor Technology, Sematech, 1997.
3. Takeuchi D., Shimada N., Matsuo J., Yamada I. Nucl. Instr. and Meth. B. 121:1997;345.
4. Strongin D., Mowlem J. Chem. Phys. Lett. 187:1991;281.
5. Tsekouras A.A., Iedema M.J., Ellison G.B., Cowin J.P. Int. J. Mass Spectrom. Ion Process. 174:1998;219.
6. Wainhaus S.B., Lim H., Schultz D.G., Hanley L. J. Chem. Phys. 106:1997;10329.
7. Burroughs J.A., Hanley L. Anal. Chem. 66:1994;3644.
8. Ada E.T., Hanley L., Etchin S., Melngailis J., Dressick W.J., Chen M.-S., Calvert J.M. J. Vac. Sci. Technol. B. 13:1995;2189.
9. Reinke P., Jacob W., Moller W. J. Appl. Phys. 74:1993;1354.
10. Kotter F., Benninghoven A. Appl. Surf. Sci. 133:1998;47.
11. Ada E.T., Hanley L. Int. J. Mass Spectrom. Ion Process. 174:1998;231.
12. Jacob W. Thin Solid Films. 326:1998;1.
13. Chan C.-M., Ko T.-M., Hiraoka H. Surf. Sci. Rep. 24:1996;1.
14. Zalm P.C. Pure Appl. Chem. 57:1985;1253.
15. Johnson E.E., Ratner B.D. J. Elec. Spect. Rel. Phenom. 81:1996;303.
16. Bello I., Chang W.H., Lau W.M. J. Vac. Sci. Technol. A. 12:1994;1425.
17. Coburn J.W. Appl. Phys. A. 59:1994;451.
18. Graves D.B., Gottscho R.A. Comp. Phys. 4:1990;584.
19. Wainhaus S.B., Gislason E.A., Hanley L. J. Am. Chem. Soc. 119:1997;4001.
20. Schultz D.G., Wainhaus S.B., Hanley L., de Sainte Claire P., Hase W.L. J. Chem. Phys. 106:1997;10337.
21. H. Lim, D.G. Schultz, C. Yu, L. Hanley, Anal. Chem. (1999) in press.
22. Lim H., Schultz D.G., Gislason E.A., Hanley L. J. Phys. Chem. B. 102:1998;9362.
23. Lim H., Schultz D.G., Gislason E.A., Hanley L. J. Phys. Chem. B. 102:1998;4573.
24. Ada E.T., Kornienko O., Hanley L. J. Phys. Chem. B. 102:1998;3959.
25. Schultz D.G., Hanley L. J. Chem. Phys. 109:1998;10976.
26. D.G. Schultz, H. Lim, S. Grabis, L. Hanley, J. Mass Spectrom. 34 (1999) 217.
27. Hanley L., Lim H., Schultz D.G., Wainhaus S.B., Claire P. d.S., Hase W.L. Nucl. Instr. and Meth. B. 125:1997;218.
28. Dongre A.R., Somogyi A., Wysocki V.H., Mass J. Spectrom. 31:1996;339.
29. Cooks R.G., Ast T., Mabud M.A. Int. J. Mass Spectrom. Ion Process. 100:1990;209.
30. Hendell E., Even U., Raz T., Levine R.D. Phys. Rev. Lett. 75:1995;2670.
31. Morris J.R., Kim G., Barstis T.L.O., Mitra R., Jacobs D.C. J. Chem. Phys. 107:1997;6448.
32. Kang H., Lee H.W., Cho W.R., Lee S.M. Chem. Phys. Lett. 292:1998;213.
33. Munro H.S., Ward R.J. Polymer. 34:1993;2250.
34. Strobel M., Corn S., Lyons C.S., Korba G.A. J. Polym. Sci. Pt. A Polym. Chem. 25:1987;1295.
35. Freiser B.S., Beauchamp J.L. J. Am. Chem. Soc. 96:1974;6260.