Plasma induced copolymerization of hexafluoropropylene and octafluoropropane

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 1, 1999, Pages 275-281

  Leezenberg, Pieter B ^a,b   Reiley, Timothy C ^a   Tyndall, George W ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

^b MAXTOR CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033482258     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581581     Document Type: Article

References (23)

1. J. Bandrup and E. H. Immergut, Polymer Handbook, 3rd ed. (Wiley, New York, 1989).
2. B. D. Ratner, in Plasma Deposition, Treatment and Etching of Polymers, edited by R. d'Agostino (Academic, San Diego, 1990).
3. Polymers for Electronic and Photonic Applications, edited by C. P. Wong (Academic, San Diego, 1993).
4. R. d'Agostino, in Plasma Deposition, Treatment and Etching of Polymers, edited by R. d'Agostino (Academic, San Diego, 1990).
5. H. Yasuda, Plasma Polymerization (Academic, Orlando, 1985).
6. R. Chen, V. Gorelik, and M. S. Silverstein, J. Appl. Polym. Sci. 56, 615 (1995).
7. F. M. Fowkes, in Chemistry and Physics of Interfaces, edited by S. Ross (American Chemical Society, Washington D.C., 1965).
8. M. S. Silverstein, R. Chen, and O. Kesler, Polym. Eng. Sci. 36, 2542 (1996).
9. A. Dilks and E. Kay, Macromolecules 14, 855 (1981).
10. M. Horie, J. Vac. Sci. Technol. A 13, 2490 (1995).
11. Y. Haque and B. D. Ratner, J. Polym. Sci. B 26, 1237 (1988).
12. M. A. Golub, T. Wydeven, and R. D. Cormia, J. Polym. Sci. A 30, 2683 (1992).
13. G. P. Lopez and B. D. Ratner, J. Polym. Sci. A 30, 2415 (1992).
14. S. Nishimura, A. Nagai, A. Takahashi, T. Narita, T. Hagiwara, and H. Hamana, Macromolecules 25, 1648 (1992).
15. S. Nishimura, A. Nagai, A. Takahashi, T. Narita, T. Hagiwara, and H. Hamana, Polymer 35, 3474 (1994).
16. R. d'Agostino, R. Lamendola, P. Favia, and A. Gigual, J. Vac. Sci. Technol. A 12, 308 (1993).
17. J. Pacansky, C. D. England, and R. Waltman, Appl. Spectrosc. 40, 8 (1986).
18. R. E. Moynihan, J. Am. Chem. Soc. 81, 1045 (1959).
19. H. Giegengack and D. Hinze, Phys. Status Solidi A 8, 513 (1971).
20. W. K. Fisher and J. C. Corelli, J. Polym. Sci. A 19, 2465 (1981).
21. T. Masuoka and H. Yasuda, J. Polym. Sci. B 20, 2633 (1982).
22. R. Chen and M. S. Silverstein, J. Polym. Sci. A 34, 207 (1996).
23. T. Masuoka, T. Iwatsubo, and K. Mizoguchi, J. Appl. Polym. Sci. 46, 311 (1992).