Ion energy distribution functions in inductively coupled radio-frequency discharges - Mixtures of Cl2/BCl3/Ar

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 6, 1998, Pages 3389-3395

  Nichols, C A ^a   Woodworth, J R ^a   Hamilton, T W ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032335990     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581491     Document Type: Article

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