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Surface and Coatings Technology

Volumn 93, Issue 1, 1997, Pages 105-111

Problems of large scale deposition of thin plasma polymer films

(2) Poll, H U a Schreiter, S a

a FZM GmbH Mittelsachsen (Germany)

Author keywords

Large scale deposition; Plasma polymerization; Plasmachemical conversion

Indexed keywords

DEPOSITION; FILM GROWTH; GLOW DISCHARGES; PLASMA APPLICATIONS; POLYMERIZATION; REACTION KINETICS; SUBSTRATES; THIN FILMS; TRANSPORT PROPERTIES;

PLASMA CHEMICAL GAS CONVERSION; PLASMA POLYMERIZATION;

PLASTIC FILMS;

EID: 0031198253 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(97)00024-8 Document Type: Article

Times cited : (12)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.