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Volumn 15, Issue 1, 2004, Pages 75-83

In situ and real-time tensile testing of thin films using double-field of-view electronic speckle pattern interferometry

Author keywords

Deformation; Electronic speckle pattern interferometry; Mechanical properties; Tensile testing; Thin films

Indexed keywords

DEFLECTION (STRUCTURES); DEFORMATION; INTERFEROMETRY; PERFORMANCE; TENSILE TESTING; THICKNESS MEASUREMENT;

EID: 0842291565     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/15/1/011     Document Type: Article
Times cited : (19)

References (33)
  • 1
    • 0032500424 scopus 로고    scopus 로고
    • Size effects in materials due to microstructural and dimensional constrains: A comparative review
    • Arzt E 1998 Size effects in materials due to microstructural and dimensional constrains: a comparative review Acta Mater. 46 5611-26
    • (1998) Acta Mater. , vol.46 , pp. 5611-5626
    • Arzt, E.1
  • 2
    • 0031247649 scopus 로고    scopus 로고
    • Investigation of the elastic modulus of thin films using simple biaxial bending techniques
    • Jämting Å K, Bell J M, Swain M V and Schwarzer N 1997 Investigation of the elastic modulus of thin films using simple biaxial bending techniques Thin Solid Films 308/309 304-9
    • (1997) Thin Solid Films , vol.308-309 , pp. 304-309
    • Jämting, Å.K.1    Bell, J.M.2    Swain, M.V.3    Schwarzer, N.4
  • 4
    • 0026416783 scopus 로고
    • Bending tests to estimate the through-thickness strength and interfacial shear strength in coated systems
    • Ramsey P M, Chandler H W and Page T F 1991 Bending tests to estimate the through-thickness strength and interfacial shear strength in coated systems Thin Solid Films 201 81-9
    • (1991) Thin Solid Films , vol.201 , pp. 81-89
    • Ramsey, P.M.1    Chandler, H.W.2    Page, T.F.3
  • 5
    • 0035558946 scopus 로고    scopus 로고
    • Study of the yielding and strain hardening behavior of a copper thin film on a silicon substrate using microbeam bending
    • Florando J N and Nix W D 2001 Study of the yielding and strain hardening behavior of a copper thin film on a silicon substrate using microbeam bending Mater. Res. Soc. Symp. Proc. 673 1.9-1.9.6
    • (2001) Mater. Res. Soc. Symp. Proc. , vol.673
    • Florando, J.N.1    Nix, W.D.2
  • 6
    • 0031248742 scopus 로고    scopus 로고
    • Between nanoindentation and scanning force microscopy: Measuring mechanical properties in the nanometer regime
    • Baker S P 1997 Between nanoindentation and scanning force microscopy: measuring mechanical properties in the nanometer regime Thin Solid Films 308/309 289-96
    • (1997) Thin Solid Films , vol.308-309 , pp. 289-296
    • Baker, S.P.1
  • 7
    • 0041760448 scopus 로고    scopus 로고
    • Elastic and plastic properties of thin films on substrates: Nanoindentation techniques
    • Nix W D 1997 Elastic and plastic properties of thin films on substrates: nanoindentation techniques Mater. Sci. Eng. A 234-236 37-44
    • (1997) Mater. Sci. Eng. A , vol.234-236 , pp. 37-44
    • Nix, W.D.1
  • 8
    • 0035797019 scopus 로고    scopus 로고
    • Mechanical properties of thin films measured by nanoindenters
    • Ishikawa H, Fudetani S and Hirohashi M 2001 Mechanical properties of thin films measured by nanoindenters Appl. Surf. Sci. 178 56-62
    • (2001) Appl. Surf. Sci. , vol.178 , pp. 56-62
    • Ishikawa, H.1    Fudetani, S.2    Hirohashi, M.3
  • 10
    • 79956030575 scopus 로고    scopus 로고
    • Measuring thin film and multiplayer elastic constants by coupling in situ tensile testing with x-ray diffraction
    • Badawi K F, Villain P, Goudeau Ph and Renault P O 2002 Measuring thin film and multiplayer elastic constants by coupling in situ tensile testing with x-ray diffraction Appl. Phys. Lett. 80 4705-7
    • (2002) Appl. Phys. Lett. , vol.80 , pp. 4705-4707
    • Badawi, K.F.1    Villain, P.2    Goudeau, Ph.3    Renault, P.O.4
  • 12
    • 0035860885 scopus 로고    scopus 로고
    • Deformation behavior of thin copper films on deformable substrates
    • Hommel M and Kraft O 2001 Deformation behavior of thin copper films on deformable substrates Acta Mater. 49 3935-47
    • (2001) Acta Mater. , vol.49 , pp. 3935-3947
    • Hommel, M.1    Kraft, O.2
  • 13
    • 0033354085 scopus 로고    scopus 로고
    • Micro-tensile and fatigue testing of copper thin films on substrates
    • Hommel M, Kraft O, Baker S P and Arzt E 1999 Micro-tensile and fatigue testing of copper thin films on substrates Mater. Res. Soc. Symp. Proc. 546 133-8
    • (1999) Mater. Res. Soc. Symp. Proc. , vol.546 , pp. 133-138
    • Hommel, M.1    Kraft, O.2    Baker, S.P.3    Arzt, E.4
  • 14
    • 0032295384 scopus 로고    scopus 로고
    • Tensile testing of ultra-thin-film materials deposited on polyimide for MEMS applications
    • Tregilgas J H and Strumpell M 1998 Tensile testing of ultra-thin-film materials deposited on polyimide for MEMS applications Mater. Res. Soc. Symp. Proc. 518 179-84
    • (1998) Mater. Res. Soc. Symp. Proc. , vol.518 , pp. 179-184
    • Tregilgas, J.H.1    Strumpell, M.2
  • 15
    • 0031236257 scopus 로고    scopus 로고
    • Two interferometric methods for the mechanical characterization of thin films by bulging tests. Application to single crystal of silicon
    • Bonnote E, Delobelle P and Bornier L 1997 Two interferometric methods for the mechanical characterization of thin films by bulging tests. Application to single crystal of silicon J. Mater. Res. 12 2234-48
    • (1997) J. Mater. Res. , vol.12 , pp. 2234-2248
    • Bonnote, E.1    Delobelle, P.2    Bornier, L.3
  • 16
    • 0031245815 scopus 로고    scopus 로고
    • Characterisation of TiN thin films using the bulge test and the nanoindentation technique
    • Karimi A, Shojaei O R, Kruml T and Martin J L 1997 Characterisation of TiN thin films using the bulge test and the nanoindentation technique Thin Solid Films 308/309 334-9
    • (1997) Thin Solid Films , vol.308-309 , pp. 334-339
    • Karimi, A.1    Shojaei, O.R.2    Kruml, T.3    Martin, J.L.4
  • 17
    • 0035971709 scopus 로고    scopus 로고
    • Young's modulus measurements and grain boundary sliding in free-standing thin metal films
    • Kalkman A J, Verbruggen A H and Janssen G C A M 2001 Young's modulus measurements and grain boundary sliding in free-standing thin metal films Appl. Phys. Lett. 78 2673-5
    • (2001) Appl. Phys. Lett. , vol.78 , pp. 2673-2675
    • Kalkman, A.J.1    Verbruggen, A.H.2    Janssen, G.C.A.M.3
  • 20
    • 36549104881 scopus 로고
    • Fracture testing of silicon microelements in situ in a scanning electron microscope
    • Johansson S, Schweitz J-Å, Tenerz L and Tirén J 1988 Fracture testing of silicon microelements in situ in a scanning electron microscope J. Appl. Phys. 63 4799-803
    • (1988) J. Appl. Phys. , vol.63 , pp. 4799-4803
    • Johansson, S.1    Schweitz, J.-A.2    Tenerz, L.3    Tirén, J.4
  • 21
    • 0342988586 scopus 로고    scopus 로고
    • Determination of elastic modulus of thin films and small specimens using beam bending methods
    • Menčik J and Quandt E 1999 Determination of elastic modulus of thin films and small specimens using beam bending methods J. Mater. Res. 14 2152-60
    • (1999) J. Mater. Res. , vol.14 , pp. 2152-2160
    • Menčik, J.1    Quandt, E.2
  • 22
    • 0033719568 scopus 로고    scopus 로고
    • Microbridge testing of silicon nitride thin films deposited on silicon wafers
    • Zhang T Y, Su Y J, Qian C F, Zhao M H and Chen L Q 2000 Microbridge testing of silicon nitride thin films deposited on silicon wafers Acta Mater. 48 2843-57
    • (2000) Acta Mater. , vol.48 , pp. 2843-2857
    • Zhang, T.Y.1    Su, Y.J.2    Qian, C.F.3    Zhao, M.H.4    Chen, L.Q.5
  • 23
    • 0037210072 scopus 로고    scopus 로고
    • A methodology for determining mechanical properties of freestanding thin films and MEMS materials
    • Espinosa H D, Prorok B C and Fischer M 2003 A methodology for determining mechanical properties of freestanding thin films and MEMS materials J. Mech. Phys. Solids 51 47-67
    • (2003) J. Mech. Phys. Solids , vol.51 , pp. 47-67
    • Espinosa, H.D.1    Prorok, B.C.2    Fischer, M.3
  • 24
    • 0031236953 scopus 로고    scopus 로고
    • A new technique for measuring the mechanical properties of thin films
    • Sharpe W N, Yuan B and Edwards R L 1997 A new technique for measuring the mechanical properties of thin films J. Microelectromech. Syst. 6 193-9
    • (1997) J. Microelectromech. Syst. , vol.6 , pp. 193-199
    • Sharpe, W.N.1    Yuan, B.2    Edwards, R.L.3
  • 25
    • 0034226704 scopus 로고    scopus 로고
    • Tensile testing of free-standing Cu, Ag and Al thin films and Ag/Cu multilayers
    • Huang H and Spaepen F 2000 Tensile testing of free-standing Cu, Ag and Al thin films and Ag/Cu multilayers Acta Mater. 48 3261-9
    • (2000) Acta Mater. , vol.48 , pp. 3261-3269
    • Huang, H.1    Spaepen, F.2
  • 26
    • 0035279276 scopus 로고    scopus 로고
    • Microscale materials testing using MEMS actuators
    • Haque M A and Saif M T A 2001 Microscale materials testing using MEMS actuators J. Microelectromech. Syst. 10 146-52
    • (2001) J. Microelectromech. Syst. , vol.10 , pp. 146-152
    • Haque, M.A.1    Saif, M.T.A.2
  • 28
    • 0037453320 scopus 로고    scopus 로고
    • Tensile behavior of free-standing gold films. Coarse-grained films
    • Emery R D and Povirk G L 2003 Tensile behavior of free-standing gold films. Part I. Coarse-grained films Acta Mater. 51 2067-78
    • (2003) Acta Mater. , vol.51 , Issue.PART 1 , pp. 2067-2078
    • Emery, R.D.1    Povirk, G.L.2
  • 29
    • 0037340866 scopus 로고    scopus 로고
    • Mechanical measurements at the micron and nanometer scales
    • Knauss W G, Chasiotis I and Huang Y 2003 Mechanical measurements at the micron and nanometer scales Mech. Mater. 35 217-31
    • (2003) Mech. Mater. , vol.35 , pp. 217-231
    • Knauss, W.G.1    Chasiotis, I.2    Huang, Y.3
  • 31
    • 0036494734 scopus 로고    scopus 로고
    • In situ tensile testing of nano-scale specimens in SEM and TEM
    • Haque M A and Saif M T A 2002 In situ tensile testing of nano-scale specimens in SEM and TEM Exp. Mech. 42 123-8
    • (2002) Exp. Mech. , vol.42 , pp. 123-128
    • Haque, M.A.1    Saif, M.T.A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.