|
|
Volumn 518, Issue , 1998, Pages 179-184
|
|
Tensile testing of ultra-thin-film materials deposited on polyimide for MEMS applications
a
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
BRITTLENESS;
ELASTICITY;
MECHANICAL VARIABLES MEASUREMENT;
POLYIMIDES;
RECRYSTALLIZATION (METALLURGY);
SPUTTER DEPOSITION;
STRAIN HARDENING;
STRESS RELAXATION;
TENSILE TESTING;
THICKNESS MEASUREMENT;
ULTRATHIN FILMS;
MESOTRONIX NANOTENSIOMETER;
STRESS RELAXATION MEASUREMENTS;
ULTIMATE TENSILE STRENGTHS;
MICROELECTROMECHANICAL DEVICES;
|
|
EID: 0032295384
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-518-179 Document Type: Conference Paper |
|
Times cited : (7)
|
|
References (8)
|
