Between nanoindentation and scanning force microscopy: Measuring mechanical properties in the nanometer regime

Thin Solid Films

Volumn 308-309, Issue 1-4, 1997, Pages 289-296

  Baker, Shefford P ^a  

^a MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

Author keywords

Mechanical properties; Nanoindentation; Scanning force microscopy

Indexed keywords

MICROSCOPIC EXAMINATION; PROTECTIVE COATINGS; STIFFNESS;

NANOINDENTATION; SCANNING FORCE MICROSCOPY (SFM);

THIN FILMS;

EID: 0031248742     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00556-7     Document Type: Article

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