Mechanical properties of thin films measured by nanoindenters

Applied Surface Science

Volumn 178, Issue 1-4, 2001, Pages 56-62

  Ishikawa, Hiromi ^a   Fudetani, Shuichi ^b   Hirohashi, Mitsuji ^b  

^a Machinery and Metallurgy Research Institute of Chiba Prefecture   (Japan)

^b CHIBA UNIVERSITY   (Japan)

Author keywords

Arc ion plating; Nanoindenter; Penetration hardness; Silicon nitride; Young's modulus

Indexed keywords

DEPOSITION; ELASTIC MODULI; INDENTATION; MICROHARDNESS; STAINLESS STEEL; THIN FILMS;

ARC ION PLATING; NANOINDENTERS; PENETRATION HARDNESS;

SILICON NITRIDE;

EID: 0035797019     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00242-2     Document Type: Article

References (11)