Nanoindentation and FEM study of the effect of internal stress on micro/nano mechanical property of thin CNx films

Thin Solid Films

Volumn 377-378, Issue , 2000, Pages 138-147

  Bai, Mingwu ^a   Kato, Koji ^a   Umehara, Noritsugu ^a   Miyake, Yoshihiko ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COMPUTATIONAL METHODS; COMPUTER SIMULATION; ELASTIC MODULI; FINITE ELEMENT METHOD; HARDNESS; NITRIDES; RESIDUAL STRESSES; SYNTHESIS (CHEMICAL); THIN FILMS; TRIBOLOGY;

ION BEAM ASSISTED DEPOSITION METHOD; NANOINDENTATION PROCESS;

PROTECTIVE COATINGS;

EID: 17444435968     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01314-6     Document Type: Article

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