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Volumn 14, Issue 5, 1999, Pages 2152-2161
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Determination of elastic modulus of thin films and small specimens using beam bending methods
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Author keywords
[No Author keywords available]
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Indexed keywords
BENDING (DEFORMATION);
ELASTIC MODULI;
ELECTRON BEAMS;
MEASUREMENT ERRORS;
MECHANICAL TESTING;
MECHANICAL VARIABLES MEASUREMENT;
BEAM BENDING METHODS;
BENDING TESTS;
THIN FILMS;
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EID: 0342988586
PISSN: 08842914
EISSN: None
Source Type: Journal
DOI: 10.1557/JMR.1999.0291 Document Type: Article |
Times cited : (44)
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References (25)
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