Modeling of competitive gettering of iron in silicon integrated circuit technology

Journal of the Electrochemical Society

Volumn 150, Issue 4, 2003, Pages

  Istratov, Andrei A ^a   Huber, Walter ^b   Weber, Eicke R ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Sumco USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC CONDUCTIVITY; IRON; OPTIMIZATION; RAPID THERMAL ANNEALING; SEMICONDUCTOR DOPING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SUBSTRATES; ULSI CIRCUITS;

GETTERING; OXIDE PRECIPITATES; RAPID THERMAL PROCESSING;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0037397011     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1556598     Document Type: Article

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