Gettering of iron in silicon-on-insulator wafers

Applied Physics Letters

Volumn 71, Issue 8, 1997, Pages 1107-1109

  Beaman, Kevin L ^a   Agarwal, Aditya ^a,b   Kononchuk, Oleg ^a   Koveshnikov, Sergei ^a,c   Bondarenko, Irina ^a   Rozgonyi, George A ^a  

^a North Carolina State University   (United States)

^b NOKIA RESEARCH CENTER   (United States)

^c SEH America   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0013283246     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.119741     Document Type: Article

References (9)

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