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Volumn 146, Issue 10, 1999, Pages 3773-3777

Diffusion of iron in silicon dioxide

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; DEEP LEVEL TRANSIENT SPECTROSCOPY; DIFFUSION IN SOLIDS; HIGH TEMPERATURE EFFECTS; IRON; MATHEMATICAL MODELS; SILICON WAFERS; THERMOOXIDATION;

EID: 0033343703     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1392548     Document Type: Article
Times cited : (45)

References (26)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.