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Volumn 146, Issue 10, 1999, Pages 3773-3777
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Diffusion of iron in silicon dioxide
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTIVATION ENERGY;
DEEP LEVEL TRANSIENT SPECTROSCOPY;
DIFFUSION IN SOLIDS;
HIGH TEMPERATURE EFFECTS;
IRON;
MATHEMATICAL MODELS;
SILICON WAFERS;
THERMOOXIDATION;
SURFACE PHOTOVOLTAGE TECHNIQUE;
TOTAL REFLECTION X-RAY FLUORESCENCE;
SILICA;
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EID: 0033343703
PISSN: 00134651
EISSN: None
Source Type: Journal
DOI: 10.1149/1.1392548 Document Type: Article |
Times cited : (45)
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References (26)
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