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Solid State Phenomena

Volumn 82-84, Issue , 2002, Pages 349-354

Efficiency of intrinsic gettering for copper in silicon

(4) Isomae, S a Ishida, H a Itoga, T a Hozawa, K a

a HITACHI LTD (Japan)

Author keywords

Copper; Gettering efficiency; Intrinsic gettering; Oxygen precipitates

Indexed keywords

ANNEALING; CONCENTRATION (PROCESS); CRYSTAL GROWTH FROM MELT; OXYGEN; SILICON WAFERS;

GETTERING EFFICIENCY; INTRINSIC GETTERING; OXYGEN PRECIPITATES;

COPPER;

EID: 4244063137 PISSN: 10120394 EISSN: None Source Type: Book Series
DOI: None Document Type: Conference Paper

Times cited : (5)

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