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Semiconductor Science and Technology

Volumn 16, Issue 7, 2001, Pages 567-574

Gettering simulator: Physical basis and algorithm

(4) Hieslmair, H a Balasubramanian, S a Istratov, A A a Weber, E R a

a Lawrence Berkeley National Laboratory (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CRYSTAL IMPURITIES; DIFFERENTIAL EQUATIONS; DIFFUSION; FINITE DIFFERENCE METHOD; MATHEMATICAL MODELS; REACTION KINETICS; SEGREGATION (METALLOGRAPHY); SILICON WAFERS; TRANSITION METALS;

GETTERING; ROBUST ALGORITHMS;

GETTERS;

EID: 0035398442 PISSN: 02681242 EISSN: None Source Type: Journal
DOI: 10.1088/0268-1242/16/7/307 Document Type: Article

Times cited : (51)

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