Time-temperature profiles for optimal internal gettering of iron in silicon

Semiconductor Science and Technology

Volumn 13, Issue 12, 1998, Pages 1401-1406

  Hieslmair, H ^a   Istratov, A A ^a,b   Weber, E R ^a  

^a Lawrence Berkeley National Laboratory   (United States)

^b ST PETERSBURG STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COOLING; GETTERS; IRON; OPTIMIZATION; THERMOANALYSIS;

DENUDED ZONES (DZ); INTERNAL GETTERING;

SEMICONDUCTING SILICON;

EID: 0032295878     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/13/12/012     Document Type: Article

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