SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 20, Issue 2, 2002, Pages 564-568

Study of angular influence of C3H5+ ion deposition on polystyrene surfaces using molecular dynamics simulations

(3) Jang, Inkook a Ni, Boris a Sinnott, Susan B a

a University of Florida (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DEPOSITION; FILM GROWTH; ION BEAMS; ION BOMBARDMENT; MOLECULAR DYNAMICS; POLYSTYRENES; SCATTERING; SURFACE ROUGHNESS; THIN FILMS;

ION FRAGMENTS; POLYATOMIC HYDROCARBON IONS;

SURFACE TREATMENT;

EID: 0036494406 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1454127 Document Type: Article

Times cited : (14)

References (51)

1
- 0029408819
- (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 2994
- Kostelak, R.L.¹ Weidman, T.W.² Vaidya, S.³ Joubert, O.⁴ Palmateer, S.C.⁵ Hibbs, M.⁶

2
- 0030289169
- (1996) J. Macromol. Sci. Rev. Macromol. Chem. , vol.C36 , pp. 795
- Shi, F.F.¹

3
- 0030143664
- (1996) Surf. Sci. Rep. , vol.24 , pp. 1
- Chan, C.-M.¹ Ko, T.-M.² Hiraoka, H.³

4
- 12944263707
- (2000) Proc. Natl. Acad. Sci. U.S.A. , vol.97 , pp. 23
- Wijesundara, M.B.J.¹ Hanley, L.² Ni, B.³ Sinnott, S.B.⁴

5
- 0031190930
- (1997) J. Vac. Sci. Technol. A , vol.15 , pp. 1837
- Kim, H.Y.¹ Yasuda, H.K.²

6
- 0031198253
- (1997) Surf. Coat. Technol. , vol.93 , pp. 105
- Poll, H.-U.¹ Schreiter, S.²

7
- 0008637348
- (1992) Ceram. Bull. , vol.71 , pp. 1821
- Brenner, D.W.¹ Harrison, J.A.²

8
- 84881155372
- (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 333
- Oerhlein, G.S.¹ Zhang, Y.² Vender, D.³ Joubert, O.⁴

9
- 0000892440
- (1999) J. Appl. Phys. , vol.86 , pp. 5938
- Abrams, C.F.¹ Graves, D.B.²

10
- 0004159739
- National Research Council (National Academic, Press, Washington, DC)
- (1996) Database Needs for Modeling and Simulation of Plasma Processing: Report by the Panel on Database Needs in Plasma Processing
- Graves, D.B.¹ Kushner, M.J.² Gallagher, J.W.³ Garscadden, A.⁴ Oehrlein, G.O.⁵ Phelps, A.V.⁶

11
- 0022128756
- (1985) Pure Appl. Chem. , vol.57 , pp. 1253
- Zalm, P.C.¹

12
- 84967841006
- (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 1425
- Bello, I.¹ Chang, W.H.² Lau, W.M.³

13
- 0032335990
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 3389
- Nichols, C.A.¹ Woodworth, J.R.² Hamilton, J.W.³

14
- 84927493957
- (1992) J. Vac. Sci. Technol. A , vol.10 , pp. 1365
- Williston, L.R.¹ Bello, I.² Lau, W.M.³

15
- 0000016547
- (1981) Phys. Rev. B , vol.23 , pp. 823
- Tu, Y.Y.¹ Chuang, T.J.² Winters, H.F.³

16
- 0006176249
- (1981) J. Phys. Chem. , vol.85 , pp. 2459
- Hu, H.K.¹ Rabalais, J.W.²

17
- 0031502461
- (1997) J. Vac. Sci. Technol. A , vol.15 , pp. 2252
- Helmer, B.A.¹ Craves, B.G.²

18
- 0000511577
- (2000) J. Appl. Phys. , vol.88 , pp. 5004
- Wijesundara, M.B.J.¹ Ji, Y.² Ni, B.³ Sinnott, S.B.⁴ Hanley, L.⁵

19
- 0000708311
- (1998) J. Appl. Phys. , vol.87 , pp. 3895
- Ramalingam, S.¹ Maroudas, D.² Aydil, E.S.³

20
- 0043218362
- (1998) Appl. Phys. Lett. , vol.72 , pp. 578
- Ramalingam, S.¹ Maroudas, D.² Aydil, E.S.³

21
- 0034155683
- (2000) Appl. Phys. Lett. , vol.18 , pp. 411
- Abrams, C.F.¹ Graves, D.B.²

22
- 0032339301
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 3502
- Helmer, B.A.¹ Craves, D.B.²

23
- 0000533550
- (1996) J. Vac. Sci. Technol. B , vol.14 , pp. 3239
- Hedlund, C.¹ Strandman, C.² Katardjiev, I.V.³ Bäcklund, Y.⁴ Berg, S.⁵ Blom, H.-O.⁶

24
- 0001502419
- (1997) J. Vac. Sci. Technol. A , vol.15 , pp. 686
- Hedlund, C.¹ Jonsson, L.B.² Katardjiev, I.V.³ Berg, S.⁴ Blom, H.-O.⁵

25
- 0032025335
- (1998) Surf. Sci. , vol.401 , pp. 112
- Levine, S.W.¹ Engstrom, J.R.² Clancy, P.³

26
- 0032624912
- (1999) IEEE Trans. Plasma Sci. , vol.27 , pp. 668
- Abraham-Shrauner, B.¹ Jagannathan, N.²

27
- 0033442835
- (1999) J. Vac. Sci. Technol. A , vol.17 , pp. 2485
- Abdollahi-Alibeik, S.¹ McVittie, J.P.² Saraswat, K.C.³ Sukharev, V.⁴ Schoenborn, P.⁵

28
- 0040471674
- (1980) Jpn. J. Appl. Phys., Part 2 , vol.19
- Matusi, S.¹ Yamato, T.² Aritome, H.³ Namba, S.⁴

29
- 0018986235
- (1981) J. Vac. Sci. Technol. , vol.18 , pp. 349
- Mayer, T.M.¹ Barker, R.A.² Whitman, L.J.³

30
- 0020177218
- (1982) J. Vac. Sci. Technol. , vol.21 , pp. 757
- Mayer, T.M.¹ Barker, R.A.²

31
- 0034670771
- (2000) Phys. Rev. B , vol.62 , pp. 16031
- Palacios, F.J.¹ Ingiguez, M.P.² Lopez, M.J.³ Alonso, J.A.⁴

32
- 84913028151
- (1992) J. Vac. Sci. Technol. A , vol.10 , pp. 1212
- Barklund, A.M.¹ Blom, H.-O.²

33
- 84975344617
- (1988) J. Electrochem. Soc. , vol.135 , pp. 1816
- Hamblen, D.P.¹ Cha-Lin, A.²

34
- 0000859602
- (2000) Phys. Rev. B , vol.61 , pp. 14047
- Van Dijken, S.¹ Jorritsma, L.C.² Poelsema, B.³

35
- 0033743265
- (2000) Nucl. Instrum. Methods Phys. Res. B , vol.164 , pp. 522
- Moseler, M.¹ Rattunde, O.² Nordiek, J.³ Haberland, H.⁴

36
- 0031546220
- (1997) Nucl. Instrum. Methods Phys. Res. B , vol.121 , pp. 40
- Ohashi, T.¹ Miyake, K.² Ohashi, K.³

37
- 0035124561
- (2000) Phys. Rev. Lett. , vol.86 , pp. 260
- DeLuca, P.M.¹ Ruthe, K.C.² Bartnett, S.A.³

38
- 0003451443
- Oxford University Press, New York
- (1987) Computer Simulations of Liquids
- Allen, M.P.¹ Tildesley, D.J.²

39
- 16444366630
- (1988) Phys. Rev. B , vol.37 , pp. 6991
- Tersoff, J.¹

40
- 27744577658
- (1989) Phys. Rev. B , vol.39 , pp. 5566
- Tersoff, J.¹

41
- 33644817086
- (1990) Phys. Rev. B , vol.42 , pp. 9458
- Brenner, D.W.¹

42
- 0034339256
- (2000) Phys. Status Solidi B , vol.217 , pp. 23
- Brenner, D.W.¹

43
- 0000820294
- (1992) J. Am. Chem. Soc. , vol.114 , pp. 3207
- Williams, E.R.¹ Jones, J.G.C.² Fang, L.³ Zare, R.N.⁴ Garrison, B.J.⁵ Brenner, D.W.⁶

44
- 0000015618
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 1293
- Qi, L.¹ Sinnott, S.B.²

45
- 0000900173
- (1994) Phys. Rev. B , vol.49 , pp. 4948
- Alfonso, D.R.¹ Ulloa, S.E.² Brenner, D.W.³

46
- 0002100175
- (1998) Carbon , vol.36 , pp. 1
- Sinnott, S.B.¹ Shenderova, O.A.² White, C.T.³ Brenner, D.W.⁴

47
- 21344493056
- (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 354
- Gray, D.C.¹ Mohindra, V.² Sawin, H.H.³

48
- 0000464708
- (1991) J. Vac. Sci. Technol. A , vol.9 , pp. 779
- Gray, D.C.¹ Sawin, H.H.² Butterbaugh, J.W.³

49
- 0031269353
- (1997) J. Phys. Chem. B , vol.101 , pp. 9425
- Mackie, N.M.¹ Venturo, V.A.² Fisher, E.R.³

50
- 0032358625
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 233
- Inayoshi, M.¹ Ito, M.² Hori, M.³ Goto, T.⁴ Hiramatsu, M.⁵

51
- 4243848085
- (1997) Mater. Sci. Forum , vol.248-249 , pp. 1249
- Lee, E.H.¹ Rao, G.R.² Mansur, L.K.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.