Atomistic simulation of SiH interactions with silicon surfaces during deposition from silane containing plasmas

Applied Physics Letters

Volumn 72, Issue 5, 1998, Pages 578-580

  Ramalingam, Shyam ^a   Maroudas, Dimitrios ^a   Aydil, Eray S ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0043218362     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120764     Document Type: Article

References (11)

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