Molecular dynamics simulations of Ar+ and Cl+ impacts onto silicon surfaces: Distributions of reflected energies and angles

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 6, 1998, Pages 3502-3514

  Helmer, B A ^a   Graves, D B ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032339301     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580993     Document Type: Article

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