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Journal of Applied Physics

Volumn 84, Issue 7, 1998, Pages 3895-3911

Interactions of SiH radicals with silicon surfaces: An atomic-scale simulation study

(3) Ramalingam, Shyam a Maroudas, Dimitrios a Aydil, Eray S a

a University of California (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000708311 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.368569 Document Type: Article

Times cited : (64)

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