Molecular dynamics simulations of low energy atomic collisions between an atom and a substrate: Effect of incident angle and energy

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 121, Issue 1-4, 1997, Pages 40-43

  Ohashi, Tetsuya ^a   Miyake, Kiyoshi ^a   Ohashi, Kenya ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ATOMS; COMPUTER SIMULATION; DEPOSITION; MOLECULAR DYNAMICS; SUBSTRATES; THIN FILMS;

ION BEAM DEPOSITION;

ATOMIC BEAMS;

EID: 0031546220     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)80010-9     Document Type: Article

References (4)

1. K. Miyake et al., Surf. Coat. Tech. 65 (1994) 208.
2. T. Ohashi et al., Nucl. Instr. and Meth. B 91 (1994) 593.
3. R.J.M. Cotterill and M. Doyama, in: Lattice Defects and their Interactions, ed. R. Hasiguti (Gordon and Breach, Amsterdam, 1967) p.1.
4. Z. A. Insepov and A.M. Zhankadamova, Z. Phys. D 20 (1991) 145.