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Volumn 31, Issue 9, 2001, Pages 815-824

X-ray photoelectron spectroscopy study of carbon nitride coatings deposited by IR laser ablation in a remote nitrogen plasma atmosphere

Author keywords

Carbon nitride; Laser ablation; Nitrogen plasma; Valence band; XPS

Indexed keywords

BAND STRUCTURE; CARBON DIOXIDE LASERS; CHEMICAL BONDS; GRAPHITIZATION; INORGANIC COATINGS; PULSED LASER DEPOSITION; SILICON; SUBSTRATES; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0035446293     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.1110     Document Type: Article
Times cited : (25)

References (54)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.