Study of C-N binding states in carbon nitride films deposited by reactive XeCl laser ablation

Thin Solid Films

Volumn 347, Issue 1-2, 1999, Pages 72-77

  D'Anna, E ^a   De Giorgi, M L ^a   Luches, A ^a   Martino, M ^a   Perrone, A ^a   Zocco, A ^a  

^a Ist Naz Fis Della Materia U   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BINDING ENERGY; CARBON; CHEMICAL BONDS; GAS LASERS; LASER ABLATION; NITRIDES; NITROGEN; SILICON; SOLIDS; X RAY PHOTOELECTRON SPECTROSCOPY;

BINDING STATE; CARBON NITRIDE;

THIN FILMS;

EID: 0345201742     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01734-9     Document Type: Article

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