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Volumn 310, Issue 3-4, 1999, Pages 240-244
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Study on the crystallization behavior of amorphous carbon nitride films
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0000362746
PISSN: 00092614
EISSN: None
Source Type: Journal
DOI: 10.1016/S0009-2614(99)00724-1 Document Type: Article |
Times cited : (9)
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References (14)
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