A study of the chemical bonding and microstructure of ion beam-deposited CNx films including an XPS C 1s peak simulation

Surface and Interface Analysis

Volumn 25, Issue 9, 1997, Pages 629-642

  Baker, M A ^a   Hammer, P ^a,b  

^a JOINT RESEARCH CENTRE   (Italy)

^b UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

Carbon nitride; FTIR; Simulation; Thin film; XPS

Indexed keywords

ATOMS; CARBON; CHEMICAL BONDS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MICROSTRUCTURE; MOLECULES; NITROGEN; SIMULATION; STRUCTURE (COMPOSITION); X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE; PHYSICAL VAPOR DEPOSITION;

THIN FILMS;

EID: 0031212446     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199708)25:9<629::AID-SIA313>3.0.CO;2-5     Document Type: Article

References (27)

1. A. Y. Liu and M. L. Cohen, Phys. Rev. B 41, 10727 (1990).
2. K. J. Boyd, D. Marton, S. S. Todorov, A. H. Al-Bayati, J. Kulik, R. A. Zuhr and J. W. Rabalais, J. Vac. Sci. Technol. A 13(4), 2110 (1995).
3. F. Rossi, B. Andre, A. van Veen, P. E. Mijnarends, H. Schut, F. Labohm, M. P. Deplancke, H. Dunlop and E. Anger, Thin Solid Films 253, 85 (1994).
4. H. Sjöström, L. Hultman, J.-E. Sundgren, S. V. Hsinsworth, T. F. Page and G. S. A. M. Theunissen, J. Vac. Sci. Technol. A 14(1), 56 (1996).
5. D. Li, E. Cutiongco, Y-W. Chung, M-S. Wong and W. D. Sproul, Diamond Films Technol. 5, 261 (1995).
6. F.-R. Weber and H. Oechsner, Surf. Coat. Technol. 74/75, 704 (1995).
7. I. Gouzman, R. Brener and A. Huffman, Thin Solid Films 253, 90 (1994).
8. P. Hammer, M. A. Baker, C. Lenardi and W. Gissler, Thin Solid Films 290/291, 107 (1996).
9. M. Tabbal, P. Mérel, S. Moisa, M. Chaker, A. Ricard and M. Moison, Appl. Phys. Lett. 69(12), 1698 (1996).
10. A. Mansour and D. Ugolini, Phys. Rev. B 47(16), 10201 (1993).
11. R. Hauert, A. Glisenti, S. Metin, J. Goitia, J. H. Kaufman, P. H. M. van Loosdrecht, A. J. Kellock, P. Hoffmann, R. L. White and B. D. Hermsmeier, Thin Solid Films 268, 22 (1995).
12. P. Hammer and W. Gissler, Diamond Relat. Mater. 5, 1152 (1996).
13. S. S. Todorov, D. Marton, K. J. Boyd, A. H. Al-Bayati and J. W. Rabalais, J. Vac. Sci. Technol. A 12, 3192 (1994).
14. J. H. Kaufman, S. Metin and O. D. Saperstein, Phys. Rev. B 39, 13053 (1989).
15. M. R. Wixom, J. Am. Ceram. Soc. 73, 1686 (1990).
16. S. Prawer, K. W. Nugent, Y. Lifshitz, G. D. Lempert, E. Grossman, J. Kulik, I. Avigal and R. Kalish, Diamond Relat. Mater. 5, 433 (1996).
17. D. Dolphin and A. Wick (ads), Tabulation of Infrared Spectral Data. Wiley, New York (1977).
18. G. Socrates (ed.), Infrared Characteristic Group Frequencies. Wiley, Chichester (1980).
19. H. Sjöström, S. Stafström, M. Boman and J.-E. Sundgren, Phys. Rev. Lett. 75, 1336 (1995).
20. P. Hammer, M. A. Baker, C. Lenardi and W. Gissler, J. Vac. Sci. Technol. A (in press).
21. A. Nilsson, O. Björneholm, H. Tillborg, B. Hernnäs, R. J. Guest, A. Sandell, R. E. Palmer and N. Mârtensson, Surf. Sci. 287/288, 758 (1993).
22. S. T. Jackson and R. G. Nuzzo, Appl. Surf, Sci 90, 195 (1995).
23. J. C. Lascovich and S. Scaglione, Appl. Surf. Sci. 78, 17 (1994).
24. U. Gelius, P. F. Hedén, J. Hedman, B. J. Lindberg, R. Manne, R. Nordberg, C. Nordling and K. Siegbahn, Phys. Scr. 2, 70 (1970).
25. U. Gelius, C. J. Allan, G. Johansson, H. Siegbahn, D. A. Allison and K. Siegbahn, Phys. Scr. 3, 237 (1971).
26. G. Beamson and D. Briggs (eds), High Resolution XPS of Organic Polymers: The Scienta ESCA300 Database. Wiley, Chichester (1992).
27. F. M. Petrat, D. Wolany, B. C. Scwede, L. Weidmann and A. Benninghoven, Surf. Interface Anal. 21, 274 (1994).