SCOPUS 정보 검색 플랫폼

Solid-State Electronics

Volumn 45, Issue 8, 2001, Pages 1413-1431

Photo-induced growth of dielectrics with excimer lamps

(2) Boyd, Ian W a Zhang, Jun Ying a,b

a UNIVERSITY COLLEGE LONDON (United Kingdom)

b UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA (China)

Author keywords

Dielectric constant; Excimer lamp; Photo CVD; Semiconductor devices; Sol gel processing; Thin Ta2O5 film; UV annealing

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIELECTRIC MATERIALS; FILM GROWTH; LEAKAGE CURRENTS; PERMITTIVITY; PHOTOOXIDATION; THIN FILMS; ULTRAVIOLET RADIATION;

EXCIMER LAMPS;

ULTRAVIOLET LAMPS;

EID: 0035417524 PISSN: 00381101 EISSN: None Source Type: Journal
DOI: 10.1016/S0038-1101(00)00259-8 Document Type: Article

Times cited : (70)

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