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Thin Solid Films

Volumn 318, Issue 1-2, 1998, Pages 234-238

Investigations of photo-induced decomposition of palladium acetate for electroless copper plating

(2) Zhang, Jun Ying a Boyd, Ian W a

a UNIVERSITY COLLEGE LONDON (United Kingdom)

Author keywords

Electroless copper plating; Excimer lamps; Palladium acetate films; Photo induced decomposition

Indexed keywords

ADHESION; CATALYSTS; DECOMPOSITION; ELECTRIC CONDUCTIVITY MEASUREMENT; ELECTROLESS PLATING; MASKS; MORPHOLOGY; ORGANOMETALLICS; PALLADIUM COMPOUNDS; RADIATION EFFECTS; SEMICONDUCTING SILICON; ULTRAVIOLET RADIATION;

PALLADIUM ACETATE;

COPPER PLATING;

EID: 0032048456 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(97)01183-8 Document Type: Article

Times cited : (26)

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