Low temperature photo-oxidation of silicon using a xenon excimer lamp

Applied Physics Letters

Volumn 71, Issue 20, 1997, Pages 2964-2966

  Zhang, Jun Ying ^a   Boyd, Ian W ^a  

^a UNIVERSITY COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000693260     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120230     Document Type: Article

References (19)

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