UV light-induced deposition of low dielectric constant organic polymer for interlayer dielectrics

Optical Materials

Volumn 9, Issue 1-4, 1998, Pages 251-254

  Zhang, Jun Ying ^a   Boyd, Ian W ^a  

^a UNIVERSITY COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CURING; DEPOSITION; DIELECTRIC MATERIALS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LOW TEMPERATURE EFFECTS; OPTICAL FILMS; ORGANIC ACIDS; POLYIMIDES; QUARTZ; SEMICONDUCTING SILICON; SUBSTRATES; ULTRAVIOLET RADIATION;

CAPACITANCE VOLTAGE MEASUREMENT; IMIDIZATION; PHOTO INDUCED CONVERSION; POLYAMIC ACID;

THIN FILMS;

EID: 0031672756     PISSN: 09253467     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-3467(97)00109-2     Document Type: Article

References (10)

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6. U. Kogelschatz, Appl. Surf. Sci. 54 (1992) 410-423.
7. J.-Y. Zhang, I.W. Boyd, J. Appl. Phys. 80 (1996) 633-638.
8. C.A. Pryde, J. Polym. Sci. A 27 (1989) 711-724.
9. J.G. Calvert, J.N. Pitts, Photochemistry, Wiley, 1966.
10. P. Singer, Semiconductor International, May 1996, p. 88.