Organic thermal and electrostatic ciliary microactuator array for object manipulation

Sensors and Actuators, A: Physical

Volumn 58, Issue 1, 1997, Pages 51-60

  Suh, John W ^a   Glander, Steven F ^a   Darling, Robert B ^b,c,d,e   Storment, Christopher W ^a,f   Kovacs, Gregory T A ^a  

^a Stanford University   (United States)

^b University of Washington   (United States)

^c Unisys   (United States)

^d TEXAS INSTRUMENTS   (United States)

^e GEORGIA TECH RESEARCH INSTITUTE   (United States)

^f STANFORD UNIVERSITY   (United States)

Author keywords

Ciliary microactuator arrays; Electrostatic actuation; Object manipulation; Thermal actuation

Indexed keywords

ARRAYS; CMOS INTEGRATED CIRCUITS; ELECTRODES; ELECTROSTATIC DEVICES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYIMIDES;

CILIARY MICROACTUATOR ARRAYS; ELECTROSTATIC ACTUATION; OBJECT MANIPULATION; THERMAL ACTUATION;

ACTUATORS;

EID: 0030653431     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80224-5     Document Type: Article

References (16)

1. K.-F. Böhringer, B.R. Donald, R. Mihailovich and N.C. MacDonald, A theory of manipulation and control for microfabricated actuator arrays, Proc. IEEE Micro Electro Mechanical Systems, MEMS '94, pp. 102-107.
2. K.-F. Böhringer, B.R. Donald and N.C. MacDonald, Single-crystal silicon actuator arrays for micro manipulator tasks, Proc. IEEE Workshop on Micro Electro Mechanical Structures (MEMS 96), Feb. 1996, pp. 7-12.
3. C. Liu, T. Tsao, Y.-C. Tai, W. Liu, P. Will and C.-M. Ho, A micromachined permalloy magnetic actuator array for micro robotics assembly systems, Tech. Digest, 8th Int. Conf. Solid-State Sensors and Actuators (Transducers '95/Eurosensors IX), Stockholm, Sweden, 25-29 June, 1995, Vol. 1, pp. 328-331.
4. N. Takeshima and H. Fujita, Polyimide bimorph actuators for a ciliary motion system, ASME WAM, Symp. Micromech. Sensors, Actuators, and Systems, 1991, DSC-Vol. 32, pp. 203-209.
5. K.S.J. Pister, R. Fearing and R. Howe, A planar air levitated electrostatic actuator system, Proc. IEEE Workshop on Micro Electro Mechanical Systems, Napa Valley, CA, USA, Feb. 1990, pp. 67-71.
6. S. Konishi and H. Fujita, A conveyance system using air flow based on the concept of distributed micro motion systems, Tech. Digest, 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan, 7-10 June, 1993, pp. 28-31.
7. T. Furuhata, T. Hirano and H. Fujita, Array-driven ultrasonic microactuators, Tech. Digest, 5th Int. Conf. Solid-State Sensors and Actuators (Transducers '89), Montreux, Switzerland, 25-30 June, 1989, pp. 1056-1059.
8. H. Fujita and K. Gabriel, New opportunities for microactuators, Tech. Digest, 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA, 24-28 June, 1991, pp. 14-20.
9. G. Lin, C.-J. Kim, S. Konishi and H. Fujita, Design, fabrication, and testing of a C-shape actuator, Tech. Digest, 8th Int. Conf. Solid-State Sensors and Actuators (Transducers '95/Eurosensors IX), Stockholm, Sweden, 25-29 June, 1995, pp. 416-419.
10. A. Saiki and S. Harada, New coupling method for polyimide adhesion to LSI surface, J. Electrochem. Soc.: Solid-State Sci. Technol., 129 (1992) 2278-2281.
11. P.M. Hall, F.L. Howland, Y.S. Kim and L.H. Herring, Strains in aluminum-adhesive-ceramic tri layers, ASME J. Electronic Packaging, 112 (1990) 288-302.
12. P.M. Hall, F.L. Howland, Y.S. Kim and L.H. Herring, Errata, ASME J. Electronic Packaging, 113 (1991) 26.
13. W.-H. Chu, M. Mehregany and R.L. Mullen, Analysis of tip deflection and force of a bimetallic cantilever microactuator, J. Micromech. Microeng., 3 (1993) 4-7.
14. J. Söderkvist, Similarities between piezoelectric, thermal and other internal means of exciting vibrations, J. Micromech. Microeng., 3 (1993) 24-31.
15. J.D. Foley and A. Van Dam, Computer Graphics: Principles and Practice, Addison-Wesley, Reading, MA, 2nd edn., 1996.
16. N. Takeshima and H. Fujita, Design and control of systems with microactuator arrays, Proc. IEEE Workshop on Advanced Motion Control, Yokohama, Japan, March 1993, pp. 219-232.