Two-axis electrodynamic micropositioning devices

Journal of Micromechanics and Microengineering

Volumn 8, Issue 2, 1998, Pages 114-118

  Frank, Thomas ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODYNAMICS; ETCHING; INTEGRATED OPTOELECTRONICS; MATHEMATICAL MODELS; MICROBIOLOGY; MICROOPTICS; NATURAL FREQUENCIES; OPTICAL INSTRUMENT LENSES; PRISMS; SILICON WAFERS;

ELECTRODYNAMIC MICROPOSITIONING DEVICES; GALVANIC BATCH PROCESSES; MICROLENSES; MICROOPTICAL CHIPS; WET CHEMICAL ETCHING;

MICROACTUATORS;

EID: 0032094436     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/8/2/018     Document Type: Article

References (5)

1. Gerlach T, Enke D. Frank T, Hutschenreuther L, Schacht H-J and Schüler R 1996 Towards an integrated microsystem for the automatic adjusting of monomode optical waveguides Workshop MicroMechanics Europe MME '96 (Barcelona, 1996)
2. Trimmer WSN 1989 Microrobots and micromechanical systems Sensors Actuators 267-87
3. Kallenbach E and Bögelsack G 1991 Gerätetechnische Antriebe (Berlin: Technik)
4. Frank T 1996 Development and manufacturing of a two-dimensional microactuator for moving an optical fibre SPIE's Symp. on Micromachining and Microfabrication (Austin, TX, 1996)
5. Jendritzka D J (ed) 1995 Technischer Einsatz neuer Aktuatoren (Renningen-Malmsheim: Expert)