Robust micro conveyer realized by arrayed polyimide joint actuators

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 576-581

  Ebefors, Thorbjorn ^a   Mattsson, Johan Ulfstedt ^a   Kalvesten, Edvard ^a   Stemme, Goran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC HEATING; MICROELECTROMECHANICAL DEVICES; POLYIMIDES; ROBUSTNESS (CONTROL SYSTEMS); SEMICONDUCTING SILICON;

MICROCONVEYERS; POLYIMIDE JOINT ACTUATORS;

ACTUATORS;

EID: 0032687822     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (21)