Cyclic fatigue testing of surface-micromachined thermal actuators

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 66, Issue , 1998, Pages 273-277

  Conant, Robert A ^a   Muller, Richard S ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FAILURE (MECHANICAL); FATIGUE TESTING; HIGH TEMPERATURE EFFECTS; MICROMACHINING; PLASTIC DEFORMATION;

ACTUATION CYCLES; THERMAL ACTUATORS;

MICROACTUATORS;

EID: 0032295012     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)