3D micromachined devices based on polyimide joint technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3892, Issue , 1999, Pages 118-132

  Ebefors, Thorbjorn ^a   Ulfstedt Mattsson, Johan ^a   Kalvesten, Edvard ^a   Stemme, Goran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BENDING (DEFORMATION); CURING; ELECTRIC CURRENTS; ELECTRIC LOSSES; HEATING EQUIPMENT; POLYIMIDES; SENSORS; SHRINKAGE; SILICON; THERMAL EXPANSION; WIRE;

POLYIMIDE JOINTS; THREE DIMENSIONAL HOT-WIRE FLOW SENSORS; THREE DIMENSIONAL MICROMACHINED DEVICES;

MICROMACHINING;

EID: 0033318714     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (49)