New small radius joints based on thermal shrinkage of polyimide in V-grooves for robust self-assembly 3D microstructures

Journal of Micromechanics and Microengineering

Volumn 8, Issue 3, 1998, Pages 188-194

  Ebefors, Thorbjörn ^a   Kälvesten, Edvard ^a   Stemme, Göran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

JOINTS (STRUCTURAL COMPONENTS); MICROMACHINING; POLYIMIDES; ROBUSTNESS (CONTROL SYSTEMS); SHRINKAGE; SILICON;

GROOVE JOINTS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032164891     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/8/3/003     Document Type: Article

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