CMOS integrated ciliary actuator array as a general-purpose micromanipulation tool for small objects

Journal of Microelectromechanical Systems

Volumn 8, Issue 4, 1999, Pages 483-496

  Suh, John W ^a,b   Darling, R Bruce ^c   Böhringer, Karl F ^c   Donald, Bruce R ^d   Baltes, Henry ^e   Kovacs, Gregory T A ^b  

^a PALO ALTO RESEARCH CENTER   (United States)

^b Stanford University   (United States)

^c University of Washington   (United States)

^d Dartmouth College   (United States)

^e ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; MICROELECTROMECHANICAL DEVICES; MICROPROCESSOR CHIPS; POLYIMIDES;

CILIARY ACTUATOR ARRAYS;

MICROACTUATORS;

EID: 0033338446     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.809064     Document Type: Article

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