Microfactories; new applications of micromachine technology to the manufacture of small products

Microsystem Technologies

Volumn 3, Issue 2, 1997, Pages 37-41

  Kawahara, N ^a,d   Suto, T ^b   Hirano, T ^a   Ishikawa, Y ^b   Kitahara, T ^b   Ooyama, N ^b   Ataka, T ^c   Sato, K ^e  

^a Micromachine Center   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c SEIKO INSTRUMENTS INC   (Japan)

^d DENSO CORPORATION   (Japan)

^e NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002322916     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050052     Document Type: Article

References (7)

1. Fujita H; Iizuka T (June 1995), A thereaded Wooble Motor. Digest of Transducers '95, pp 408-411.
2. Idogaki T; Tominaga T; Senda K; Ohya N; Hattori T (June 1995), Bending and Expanding Motion Actuators. Digest of Transducers '95, pp 393-396
3. Nakamura K; Ogura H; Maeda S; Sangawa U; Aoki S; Sato T (1995), Evaluation of the Micro Wobble Motor Fabricated by Concentric Build-up Process. Proceedings of Micro Electro Mechanical Systems '95, pp 374-375
4. Keller CG; Howe RT (1995), Nickel-Filled Hexsil Thermally Actuated Tweezers. Digest of Transducers '95, pp 376-379
5. Thornell G; Bexell M; Schweitz J; Johansson S (June 1995), The Design and Fabrication of A Grippong Tool for Micromanipulation. Digest of Transducers '95, pp 388-391
6. Dutta, K (August 1970), Integrated Micromotor Concept. International Conference on Microelectronics, Circuits and System Theory, pp 36-37
7. Hattori M; Inoue H; Concept of Ecology-based CIM System. Proceedings of the Japan U.S.A. Symposium on Flexible Automation, ASME Book No. 10338B-1992, pp 1663-1666