Multilink active catheter with polyimide-based integrated CMOS interface circuits

Journal of Microelectromechanical Systems

Volumn 8, Issue 4, 1999, Pages 349-357

  Park, Ki Tae ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CMOS INTEGRATED CIRCUITS; ELECTRIC COILS; INTEGRATED CIRCUIT LAYOUT; MOSFET DEVICES; POLYIMIDES; SHAPE MEMORY EFFECT;

ACTIVE CATHETERS;

CATHETERS;

EID: 0033309881     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.809048     Document Type: Article

References (15)

1. M. Negoro, I. Takahashi, K. Nakabayashi, K. Fukui, and K. Sugita, "Current situation of intravascular neurosurgery and its future," in Proc. IEEE 5th Int. Symp. Micromachine Human Sci., Nagoya, Japan, 1994, pp. 177-180.
2. M. Esashi, K. Minami, G.-B. Lim, and K.-T. Park, "Elements for active catheter," Japan Soc. of Next Generation Sensor Technol., Nagoya, Japan, Tech. Rep. MP94-49, 1994, pp. 31-39.
3. G.-B. Lim, K.-T. Park, M. Sugihara, K. Minami, and M. Esashi, "Future of active catheter," Sens. Actuators, vol. A-56, pp. 113-121, 1996.
4. H.-L. Chau and K. D. Wise, "An ultraminiature solid state pressure sensor for a cardiovascular catheter," IEEE Trans. Electron Devices, vol. 35, pp. 2355-2361, 1988.
5. G.-B. Lim, K. Minami, M. Sugihara, and M. Esashi, "Active catheter with multi-link structure based on silicon micromachining," in Proc. IEEE Microelectromechanical Systems Workshop, Amsterdam, The Netherlands, Feb. 1995, pp. 116-121.
6. S. Aramaki, S. Kaneko, K. Arai, Y. Takahashi, H. Adachi, and K. Yanagisawa, "Tube type micro manipulator using shape memory alloy (SMA)," in Proc. IEEE 6th Int. Symp. Micromachine Human Sci., Nagoya, Japan, 1995, pp. 115-120.
7. S. Maeda, K. Abe, K. Yamamoto, O. Tohyama, and H. Ito, "Active endoscope with SMA (shape memory alloy) coil springs," in Proc. IEEE Microelectromechanical Systems Workshop, San Diego, CA, Feb. 1996, pp. 290-295.
8. D. Homma, Y. Miwa, and N. Iguchi, "Micro robots and micro mechanisms using shape memory alloy," in Integrtaed Micro-Motion System-Micromachining, Control and Applications, F. Harashima, Ed. New York: Elsevier, 1990, pp. 375-392.
9. Molding Interconnect Device International Association. (1998). MID Technology Guide [Online]. Available HTTP:http://www.midia.org
10. Y. Haga, K.-T. Park, and M. Esashi, "Active catheter using polymer links," in Tech. Dig. 15th Sensor Symposium, Kawasaki, Japan, June 1997, pp. 177-180.
11. K.-T. Park, K. Minami, and M. Esashi, "An integrated communication and control system for a multi-link active catheter," J. Micromech. Microeng., vol. 6, pp. 345-351, 1996.
12. M. Sugihara and K. Yamamoto, "Researchs on shape memory alloys micro actuators," Mitubishi Cable Industries Revi., no. 87, pp. 70-72, 1994.
13. R. Toda, K. Minami, and M. Esashi, "Study of xenon difluoride silicon etch for thin beam micromachining," in Tech. Dig. 14th Sensor Symp., Kawasaki, Japan, June 1996, pp. 175-178.
14. D. J. Beebe and D. D. Denton, "A flexible polyimide-based package for silicon sensors," Sens. Actuators, vol. A44, pp. 57-64, 1994.
15. F. Jiang Y. Tai, K. Walsh, T. Tsao, G.-B. Lee, and C.-M. Ho, "A flexible MEMS technology and its fist application to shear stress skin," in Proc. IEEE Microelectromechanical Systems Workshop, Nagoya, Japan, Jan. 1997, pp. 465-470.