Three dimensional SMA microelectrodes with clipping structure for insect neural recording

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 464-469

  Takeuchi, Shoji ^a   Shimoyama, Isao ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ETCHING; MAGNETRON SPUTTERING; PROBES; SHAPE MEMORY EFFECT; THIN FILMS; TITANIUM COMPOUNDS;

CLIPPING STRUCTURES; INSECT NEURAL RECORDING;

MICROELECTRODES;

EID: 0032672629     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746873     Document Type: Conference Paper

References (11)